Cryopumps

From our single cryopumps used in a spectrum of high technology research applications to our sophisticated cryopump systems used in the manufacturing of semiconductor, flat panel, and optical devices, CTI-Cryogenics sets the world standard for cryogenic high-vacuum technology

Key Features

  • Fast Regen™ capability that extends cryopump performance between regenerations
  • Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
  • An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
  • Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation.

Peak pumping speed

Ultimate Vacuum

Ultimate vacuum with gas ballast

Water vapour handling capacity

Noise Leve

Units

m3/h

mbar

mbar

g/h

dB(A)

nXDS6i

6.2

0.02

0.05

110

52

nXDS10i

11.4

0.007

0.04

145

52

nXDS15i

15.1

0.007

0.04

145

52

nXDS20i

22.0

0.03

0.06

220

52

XDS35i

35

0.01

0.02

240

57