Cryopumps
Cryopumps
CTI-Cryogenics is the global leader in cryogenic high vacuum technology. CTI builds a broad array of cryopumps and cryopump systems designed to deliver exceptional performance, reliability and productivity.
From our single cryopumps used in a spectrum of high technology research applications to our sophisticated cryopump systems used in the manufacturing of semiconductor, flat panel, and optical devices, CTI-Cryogenics sets the world standard for cryogenic high-vacuum technology
Peak pumping speed
Ultimate Vacuum
Ultimate vacuum with gas ballast
Water vapour handling capacity
Noise Leve
Units
m3/h
mbar
mbar
g/h
dB(A)
nXDS6i
6.2
0.02
0.05
110
52
nXDS10i
11.4
0.007
0.04
145
52
nXDS15i
15.1
0.007
0.04
145
52
nXDS20i
22.0
0.03
0.06
220
52
XDS35i
35
0.01
0.02
240
57