Semi > iXH
The iXH dry pump range is an evolution of our market leading iH, and sets new standards for harsh process capability, reliability and lower cost of ownership. iXH pumps offer greatly increased dust and powder handling capabilities.
Modular design with a wide range of pump sizes
Greatly increased powder handling capability
and innovative Gas Buster™ technology
Integral controller and safety systems for flexible operation. Low installation costs.
No preventive maintenance between major overhauls
Peak pumping speed
Power at ultimate
Power in Green Mode
Noise at ultimate
iXH sets new standards for really harsh process capabilities, reliability, and low cost of ownership. iXH pumps offer greatly increased dust and powder handling capabilities.
A wide pump temperature range allows optimisation to minimise by-product accumulation from condensation and plating reactions. iXH is available as primary pump at 100 m³/h (the iXH100) or combined with inverter-driven boosters delivering peak speeds of 665 m³/h (iXH610) or 1025 m³/h (iXH1210).
Greatly increased powder handling capability and innovati ve Gas Buster™ (1) technology
High capacity dry pumps and boosters give an expanded process window to enhance yields
Greatly increased hydrogen pumping speed for advanced EPI and solar processes
Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation and plating
Low power consumption plus Green Mode plus no routine maintenance, for low cost of ownership
Zero maintenance between overhauls and low cost of ownership