ixM Dry Pump

iXM is the future, the future is now.

Edwards iXM series, the new global benchmark in vacuum innovation, are the low energydry pumps that bring real process improvements and cost benefits to the most critical of applications.

200 - 1800 m³/h

Modular design with a wide range of pump sizes

More process capability

Greatly increased powder handling capability
and innovative Gas Buster™ technology

'Plug and Pump'

Integral controller and safety systems for flexible operation. Low installation costs.

No routine maintenance

No preventive maintenance between major overhauls

iXM is a new range of dry pumps built for green manufacturing; the energy efficient roots mechanism has been developed to dramatically reduce input power to 1.3 kW, 60% lower than the previous generation of dry pump, reducing environmental impact and lowering cost of ownership. Gas barrier technology and thermal design improvements enable four times greater corrosion resistance than iH Series product. Advanced powder handling features mean iXMwill deliver maximum reliability and extended pump life for multi-layer etch processes and reduced power consumption for CVD processes. Its compact and light-weight design, combined with exceptionally low noise and vibration, makes iXM the most versatile dry pump in the Edwards range. iXM will transform your expectations of dry vacuum pump technology, deliver real benefits and increased uptime, with minimal environmental impact.


LOW POWER

Exceptionally low power input at only 1.3 kW

for 1200 class pump

Up to 60% less power compared to alternative

dry pumps(1)

Green Mode enabled for power and nitrogen

savings while idle

INCREASED LIFESPAN

4x lower corrosion rate compared to previous

generation product

Exceptional powder handling

30% increased starting torque compared to

iGX pumps.

REDUCED ENVIRONMENTAL IMPACT

Whisper quiet at only 58 dB(A)

34% smaller footprint compared to alternative

dry pumps


iXM sizes

Peak pumping speed (1)

Ultimate pressure (1)

Power at ultimate (2)

Power in Green Mode

Noise at ultimate (1)

m³/h

mbar

kW

kW

dB(A)

Edwards  IXH610 Dry Vacuum Pump

iXM200

200

0.01

0.8

0.202

63

Edwards  IXH610 Dry Vacuum Pump

iXM600

600

0.005

1.1

0.202

57

Edwards  IXH 1210 Dry Vacuum Pump

iXM1210

1030

0.005

1.3

0.202

57

Edwards  IXH610 Dry Vacuum Pump

iXH1800

1720

0.003

2.3

0.351

63

(1) Average value, (2)Average power at 700T exhaust pressure and zero purge

Documentation & Video