{"id":2005,"date":"2024-09-10T10:04:35","date_gmt":"2024-09-10T08:04:35","guid":{"rendered":"https:\/\/www.advancedvacuum.se\/produkt\/atlas\/"},"modified":"2024-09-21T22:59:43","modified_gmt":"2024-09-21T20:59:43","slug":"atlas","status":"publish","type":"product","link":"https:\/\/www.advancedvacuum.se\/sv\/produkt\/atlas\/","title":{"rendered":"Atlas"},"content":{"rendered":"
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Atlas\u2122 fr\u00e5n Edwards, ger enast\u00e5ende tillf\u00f6rlitlighet, utm\u00e4rkt pulverhantering och korrosionsbest\u00e4ndighet, vilket ger minskande prestanda f\u00f6r halvledar-, plattsk\u00e4rms-, sol- och MOCVD-industrin.<\/p>\n<\/div>\n<\/div>\n

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Atlas reduktionsteknik: en rad l\u00f6sningar f\u00f6r reduktion av f\u00f6rbr\u00e4nningsgas – specifika f\u00f6r din process:<\/p>\n

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  • Atlas TCS f\u00f6r vanliga CVD-gaser (NF3\/F2)<\/li>\n
  • Atlas TPU f\u00f6r PFC-gaser (ClF3, C2F6, C3F8) i CVD-processer<\/li>\n
  • Atlas Kronis f\u00f6r l\u00e5gk-CVD-gaserna i n\u00e4sta generations processer<\/li>\n
  • Atlas Etch f\u00f6r semikonetsning och platta bildsk\u00e4rmsprocesser (CF4, SF6 och h\u00f6gfl\u00f6des-PFC)<\/li>\n
  • Atlas Helios f\u00f6r s\u00e4ker behandling av v\u00e4teprocesser i epitaxi och MOCVD<\/li>\n<\/ul>\n<\/div>\n<\/div>\n
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    Atlas\u2122-system har l\u00e5g br\u00e4nslef\u00f6rbrukning j\u00e4mf\u00f6rt med tidigare generations gasreduceringsanordningar. Vi anv\u00e4nder bepr\u00f6vad Alzeta\u2122 in\u00e5teldad f\u00f6rbr\u00e4nningsteknik f\u00f6r att uppn\u00e5 en avsev\u00e4rt reducerad \u00e4gandekostnad. Med ett till sex inlopp med ett antal alternativ, inklusive ett temperaturstyrningssystem (TMS), kan Atlas-system behandla en fl\u00f6deskapacitet p\u00e5 upp till 1 200 slm. De \u00e4r designade f\u00f6r att vara l\u00e4tta att anv\u00e4nda och m\u00f6jligg\u00f6ra ett effektivare underh\u00e5ll.<\/p>\n<\/div>\n<\/div>\n

    <\/div>\n","protected":false},"excerpt":{"rendered":"
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    Edwards in\u00e5teldade f\u00f6rbr\u00e4nningsteknik<\/strong><\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n

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    Den in\u00e5teldade br\u00e4nnkammaren anv\u00e4nds av de flesta stora halvledartillverkare och har blivit en v\u00e4rldsstandard inom gasreducering sedan 1994.<\/p>\n

    V\u00e5r unika f\u00f6rbr\u00e4nningsteknik arbetar med en enhetlig f\u00f6rbr\u00e4nningstemperatur. Detta s\u00e4kerst\u00e4ller mycket l\u00e5ga bakgrundsutsl\u00e4pp, och det in\u00e5tg\u00e5ende gasfl\u00f6det f\u00f6rhindrar processmaterial i kontakt med kammarv\u00e4ggarna, vilket minimerar blockeringen av fasta \u00e4mnen. Den exklusiva sammans\u00e4ttningen av f\u00f6rbr\u00e4nningsmaterialet s\u00e4kerst\u00e4ller \u00f6verl\u00e4gsen motst\u00e5ndskraft mot korrosion och hj\u00e4lper till att f\u00f6rse Atlas med o\u00f6vertr\u00e4ffad tillf\u00f6rlitlighet och s\u00e4kerhet.<\/p>\n

    P\u00e5 v\u00e5rt toppmoderna milj\u00f6innovationscenter har vi processtrimmade l\u00f6sningar f\u00f6r enast\u00e5ende prestanda, f\u00e4ltbepr\u00f6vade och tredjepartsverifierade. Abatement DRE:s str\u00e4cker sig vanligtvis bortom global och lokal lagstiftning:<\/p>\n

    SiH4 och andra halogenider under TLV<\/p>\n

    NF3 : >99% \/ <TLV<\/p>\n

    F2 : : >99% \/ <TLV<\/p>\n

    CF4 : >90%<\/p>\n

    Andra PFC : >99%<\/p>\n

    Med en expansiv installationsbas, o\u00f6vertr\u00e4ffat globalt applikationsteam och servicesupport kan vi erbjuda den b\u00e4sta l\u00f6sningen utformad f\u00f6r dina processbehov. Ta kontakt med v\u00e5rt team s\u00e5 kan vi arbeta tillsammans f\u00f6r den ultimata l\u00f6sningen.<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n","protected":false},"featured_media":1716,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"product_brand":[],"product_cat":[71],"product_tag":[],"class_list":["post-2005","product","type-product","status-publish","has-post-thumbnail","product_cat-abatement-sv","first","instock","shipping-taxable","product-type-simple"],"acf":[],"yoast_head":"\nAtlas | Advancedvacuum<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.advancedvacuum.se\/sv\/produkt\/atlas\/\" \/>\n<meta property=\"og:locale\" content=\"sv_SE\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Atlas | Advancedvacuum\" \/>\n<meta property=\"og:description\" content=\"Edwards in\u00e5teldade f\u00f6rbr\u00e4nningsteknik Den in\u00e5teldade br\u00e4nnkammaren anv\u00e4nds av de flesta stora halvledartillverkare och har blivit en v\u00e4rldsstandard inom gasreducering sedan 1994. 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