Edwards BGV gate valves are bellows sealed stainless steel gate valves for use in applications which require high leak tightness and a minimum of hydrocarbons in the vacuum system. Although principally designed for the isolation of pumps in the semiconductor fab basement, BGV gate valves are also ideal in other applications where a 1 bar differential at opening is desirable.
They are designed for use in the pressure range of 1.2 bar absolute to 1 x 10⁻⁸ mbar (1.2 x 10⁵ to 1x10⁻⁶ Pa). BGV gate valves will withstand 1.2 bar absolute in either direction allowing the vacuum line above the pump to be vented with the valve closed. The BGV manual valves have a visual indication of the gate position on the side of the assembly to show when it is open.
Avoids re-start issues by keeping the pump running during maintenance
Long service life and reliability in harsh environments.
Minimises damage due to particulates in dusty processes.
Leak rate (body / Valve seat)
Max Operating temperature (valve body)
Cycles until first service
<1x10-9 / <1x10-7
1x10-8mbar to 1.2 bar
NW50, ISO63, ISO80, ISO100, ISO160