Spectra

For Flat panel Display and Solar Cell manufacturing

Spectra
Abatement • Unique 4-stage combustion technology • Efficient SiH4 abatement • High H2 flow abatement capacity • Excellent management of high flows of NF3 / F2 • High NH3 abatement capacity • Modular design of abatement and particulate management • 80% powder removal efficiency Acid gas scrubbing • Integrated wet scrubber • Water Recirculation Unit to optimise water consumption Powder Capture Spectra ZW2 – water cooled abatement with particulate removal • Modular Wet Electrostatic Precipitator (WESP) • Removal of 99% particulate • High powder load handling capability • Low cost of ownership relative to alternative solutions   For more information don´t hesitate to contact us.
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