Advanced vacuum production

Advanced Vacuum, a Plasma-Therm company since 2011, has long been known as a manufacturer of high-quality, economical open-load and load-lock plasma processing solutions. AV systems are installed around the world in commercial R&D labs, as well as in academic, scientific, and production facilities. The Advanced Vacuum Vision™ and Apex™ product lines deliver the full range of plasma process technologies, including RIE, ICP, PE, PECVD, and PVD.

Advanced Vacuum’s robust, low-cost solutions are now integrated with Plasma-Therm’s advanced control systems, including Cortex®, our proven process development expertise, and our worldwide service and support organization.

Advanced Vacuum Products

Apex SLR™
Vision™ Series

 

  • Apex SLR
  • Vision Series

Advanced Vacuum’s APEX SLR provides etching capabilities over a variety of materials and substrates. The small footprint, low cost, ease of use and superior performance makes the Apex SLR ideal for a wide range of uniform, high quality ICP etch applications serving R&D, FA, prototyping, pilot line and low volume production. The Apex SLR is ideal for numerous technologies such as Failure/Yield Analysis, Photonics, Solid State Lighting, MEMs, and Wireless ICP etch processing.

The Apex SLR is a continuation of Plasma-Therm’s highly regarded Shuttlelock® system in a compact, robust and easily maintained form factor.  

Advanced Vacuum, a Plasma-Therm company, is the manufacturer of the Vision 300 and 400 (formerly Plasma-Therm 790+) series open-load etch and deposition systems.

The Apex SLR provides technology for etch using a high density ICP source with a RF biased lower electrode:

Apex SLR ICP (Inductively Coupled Plasma)

Handling 

The ICP system utilizes a load lock with manual loading

Productivity Enhancements

  • Process Library: The Apex SLR system uses well-established reactor technology that provides reliable performance and is supported with guidance from a continuously evolving process library.
  • Endpoint: Both laser and optical emission spectroscopy endpoint technologies are available on Apex SLR to augment processing capability.
  • Data Logging: Simplified data collection for sharing of process monitoring and recipe information.

Advanced Vacuum’s Vision platform provides flexibility for a range of applications that includes semiconductor fabrication, material science, and failure analysis. The systems, designed and built for efficiency, reliability, and small footprint, are available in several handling and plasma processing configurations to meet customer requirements.

Advanced Vacuum, a Plasma-Therm company, is the manufacturer of the Vision 300 and 400 (formerly PTI 790+) series open-load etch and deposition systems.

The Vision product lines provide technology for etch and deposition using the following configurations:

    Handling 

    RIE and PECVD systems utilize open load or manual load arrangements

    Productivity Enhancements

    • Process Library: The Vision systems use well-established reactor technologies that provide reliable performance and come with guidance from a well-developed process library.
    • Endpoint: Both laser and optical emission spectroscopy endpoint technologies are available on Vision systems to augment processing capability.
    • Data Logging: Simplified data collection for sharing of process monitoring and recipe information.
    • Factory Communication: When enabled and combined with advanced self-diagnostic features, the systems communicate status to the factory and can assist in determining preventive maintenance scheduling and detect abnormal issues.