GX Dry Pump

Semi > GX

Edwards GX Dry Pump Systems

GX is the ideal choice for medium duty applications and sets new standards for zero maintenance between overhauls and low cost of ownership

90 - 800 m³/h

Hermetically sealed, innovative mechanism

0.005 / 0.001 mbar

Superior vacuum levels achieved

'Plug and Pump'

Integral controller and safety systems for flexible operation. Low installation costs.

< 55 / 60 dB(A)

Low noise even at high pumping speeds

No routine maintenance

No preventive maintenance between major overhauls

GX sizes

Peak pumping speed

Ultimate pressure

Power at ultimate

Power in Green Mode

Noise at ultimate

m³/h

mbar

kW

kW

dB(A)

Edwards GX Dry Pump Systems 100N

GX100N

90

0.005

1.0

0.05

<60

Edwards GX Dry Pump Systems GX600N

GX600N

600

0.001

1.5

0.05

<55

Edwards GX Dry Pump Systems GX 1000N

GX1000N

1000

0.001

1.5

3.8

<55

The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

It is available as the stand-alone GX100N pump, or combined with an inverter-driven booster as the GX600N (620 m³/h peak speed) and X1000N (800 m³/h peak speed) units.

Product Features

UNIQUE PERFORMANCE

Very high load capability for reliability. Designed for reliability and performance

ENERGY EFFICIENT

High performance motors and inverter drives with low operating power consumption

SMOOTH RUNNING

Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance

ULTRA-COMPACT

An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

AUC MODE

Active Utility Control mode reduces power consumption during idle periods

ZERO MAINTENANCE

Zero maintenance between overhauls and low cost of ownership