Semi > GX
GX is the ideal choice for medium duty applications and sets new standards for zero maintenance between overhauls and low cost of ownership
Hermetically sealed, innovative mechanism
Superior vacuum levels achieved
Integral controller and safety systems for flexible operation. Low installation costs.
Low noise even at high pumping speeds
No preventive maintenance between major overhauls
Peak pumping speed
Power at ultimate
Power in Green Mode
Noise at ultimate
The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
It is available as the stand-alone GX100N pump, or combined with an inverter-driven booster as the GX600N (620 m³/h peak speed) and X1000N (800 m³/h peak speed) units.
Very high load capability for reliability. Designed for reliability and performance
High performance motors and inverter drives with low operating power consumption
Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance
An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
Active Utility Control mode reduces power consumption during idle periods
Zero maintenance between overhauls and low cost of ownership