Cryopumps

Superior performance and increased tool uptime

World standard of reliability and performance

CTI-Cryogenics is the global leader in cryogenic high vacuum technology. CTI builds a broad array of cryopumps and cryopump systems designed to deliver exceptional performance, reliability and productivity.

From our single cryopumps used in a spectrum of high technology research applications to our sophisticated cryopump systems used in the manufacturing of semiconductor, flat panel, and optical devices, CTI-Cryogenics sets the world standard for cryogenic high-vacuum technology

Key Features

Fast Regen™ capability that extends cryopump performance between regenerations
Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation.
The patented distributed control system monitors and constantly adjusts individual elements of the cryopump system
Maintains optimal system-wide vacuum performance, delivering exceptional process consistency
Quickest regenerations in single and multi-pump configurations
Low consumption of energy and cooling water with no compromise in vacuum performance
Easy system integration
Fast production installation
Enhanced remote monitoring for both preventive and predictive maintenance

Edwards CTI-Cryogenics IS cryopump systems leverage innovative, high-efficiency technology to provide unparalleled vacuum performance and energy efficiency.

A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency. On-Board IS cryopumps deliver the highest uptime, best productivity, and lowest overall cost of ownership of any cryopump system available today, backed by Edwards highly responsive global service and support network.

IS 320FX Cryopump

The On-Board® IS 320FX Cryopump, developed specifically to address the challenges of today's Ion Implant processes, provides enhanced hydrogen pumping speed and capacity, while maintaining the quality, performance and reliability you’ve come to expect.

Specifically designed for ion implant applications
Optimized for tool throughput
Intelligent “self adjusting” technology
Lower cost of ownership
Increased uptime

IS XP

The On-Board® IS XP Cryopump delivers increased capacity for PVD applications to achieve maximum productivity while maintaining process transparency. At the same time, it leverages the proven energy effi ciency, consistent performance and low cost of ownership you’ve come to expect from the On-Board® IS.

Provides capacity overhead for future process improvements
Lower Cost of Ownership
Increased Up-Time
Intelligent “Self Adjusting” Technology for Consistent Vacuum Performance

Edwards CTI-Cryogenics range of compressors

Please find more about the compressors here >